4 1 0001182171官员KLA-Tencor Corporation 0000319201 4美国证券和交易委员会华盛顿州，D.C.20549年4月4日有益所有权的变更声明1.报告人员的姓名和地址坎帕格纳，约翰彼得12233 Menalto Drive。。Los Altos Hills，CA 94022 2.发行人姓名和贸易商或交易符号KLA-Tencor Corporation（KLAC）3. I.R.S.识别报告人数，如果是实体（自愿）4.陈述月/日/年02/28/2003 5.如果修订，原始（月/日/年）的日期6.报告人员的关系发行人（检查全部适用）[]导演[] 10％所有者[x]官员（在下面给出标题）[]其他（下面指定）副总裁和财务主管7.个人或联合/小组申请（检查适用的线）[x]由一份报告人[]表格提交的表格，由多个报告人提交

表我获得，处置，或有利地拥有的非衍生证券 - - - - - - - - - - - -------------------------------------------------------------------------------------------------------------------------1)Title of Security 2)Trans- 3.Trans- 4.Securities Acquired(A) 5)Amount of 6) 7)Nature of action action or Disposed of (D) Securities Indirect Date Code A Beneficially D Beneficial (Month/ or Owned at or Ownership Day/Year) Code V Amount D Price End of Month I - ------------------------------------------------------------------------------------------------------------------------------------ 常见股02/28/03 S 324 D $ 35.6900 0 D Direct

表II（第1部分）获得，处置，或有利地拥有的衍生证券（第1至6栏） - - - - - - - - --------------------------------------------------------------------------------------------------------------------------------------------------------------------------1)Title of Derivative 2)Conversion 3)Trans- 4)Trans- 5)Number of Derivative 6)Date Exercisable and Security or Exercise action action Securities Acquired (A) Expiration Date Price of Date Code or Disposed of (D) Derivative Security Code V A D Exercisable Expiration - ------------------------------------------------------------------------------------------------------------------------------------ 非合格的股票期权$ 31.8125 12/22/10（购买权）非合格股票期权$ 34.6700 01/28/13（购买）非合格股票期权$ 37.0500 11/08/12（买）非合格的股票期权$ 29.3100 10/02/11（购买权）

表II（第2部分）获得，处置或有利地拥有的衍生证券（专栏1,3和11） - - - - - - - ------------------------------------------------------------------------------------------------------------------------------------------------------------------------------1)Title of Derivative 3)Trans- 7)Title and Amount 8)Price 9)Number of 10) 11)Nature of Security action of Underlying of Deri- Derivative Indirect Date Securities vative Securities D Beneficial Amount or Security Beneficially or Ownership Number of Owned at I - Title Shares End of Month - ------------------------------------------------------------------------------------------------------------------------------------ 非合格的股票期权普通股票16,730 16,730 d Direct（购买权）非合格股票期权普通股票6,500 6,500 D Direct（购买权）非合格股票期权普通股票3,250 3,250 D直接（买）非合格的股票期权普通股19,500 19,500 d直接（买货） 答复说明： - 根据423员股票采购计划获得的324股股份。

报告人/ s /签署的签名：STUART J. Nichols为：John Peter Campagna日期为02/28/03