FORM 4
Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue.SeeInstruction 1(b).
UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person*
坎帕尼亚大区约翰彼得
2. Issuer NameandTicker or Trading Symbol
KLA TENCOR CORP [klac]		 5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
_____ Director _____ 10% Owner
__X__ Officer (give title below) _____ Other (specify below)
Vice President & Treasurer
(Last)
(First)
(Middle)
C/O KLA-TENCOR CORP., 160 RIO ROBLES		 3. Date of Earliest Transaction (Month/Day/Year)
07/30/2003
(街)

SAN JOSE, CA 95134		 4. If Amendment, Date Original Filed(Month/Day/Year)
07/31/2003		 6. Individual or Joint/Group Filing(检查适用林e)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1.Title of Security
(Instr. 3)		 2. Transaction Date (Month/Day/Year) 2A. Deemed Execution Date, if any (Month/Day/Year) 3. Transaction Code
(Instr. 8)		 4. Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4 and 5)		 5. Amount of Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 3 and 4)		 6. Ownership Form: Direct (D) or Indirect (I)
(Instr. 4)		 7. Nature of Indirect Beneficial Ownership
(Instr. 4)
Code V Amount (A) or (D) Price

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
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Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 3)		 2. Conversion or Exercise Price of Derivative Security 3. Transaction Date (Month/Day/Year) 3A. Deemed Execution Date, if any (Month/Day/Year) 4. Transaction Code
(Instr. 8)		 5. Number of Derivative Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4, and 5)		 6. Date Exercisable and Expiration Date
(Month/Day/Year)		 7. Title and Amount of Underlying Securities
(Instr. 3 and 4)		 8. Price of Derivative Security
(Instr. 5)		 9. Number of Derivative Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 4)		 10. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 4)		 11. Nature of Indirect Beneficial Ownership
(Instr. 4)
Code V (A) (D) Date Exercisable Expiration Date Title Amount or Number of Shares
Non-Qualified Stock Option $ 29.31 10/02/2002 10/02/2011 Common Stock 13,325 13,325 D
Non-Qualified Stock Option $ 31.8125 12/22/2001 12/22/2010 Common Stock 9,896 9,896 D
Non-Qualified Stock Option $ 34.67 11/08/2003 01/28/2013 Common Stock 6,500 6,500 D
Non-Qualified Stock Option $ 37.05 11/08/2003 11/08/2012 Common Stock 3,250 3,250 D
Non-Qualified Stock Option $ 51.229 07/30/2003 A 3,250 11/08/2003 07/30/2013 Common Stock 3,250 $ 0 3,250 D

Reporting Owners

Reporting Owner Name / Address Relationships
Director 10% Owner Officer Other
坎帕尼亚大区约翰彼得
C/O KLA-TENCOR CORP.
160 RIO ROBLES
SAN JOSE, CA 95134		 Vice President & Treasurer

Signatures

John Peter Campagna 08/01/2003
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person,seeInstruction 4(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations.See18 U.S.C. 1001 and 15 U.S.C. 78ff(a).

Remarks:
Amendment due to address change.

Note: File three copies of this Form, one of which must be manually signed. If space is insufficient,seeInstruction 6 for procedure.

Potential persons who are to respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB number.
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