FORM 3
UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person*
YARBRO STAN
2. Date of Event Requiring Statement (Month/Day/Year)
11/05/2003		 3. Issuer NameandTicker or Trading Symbol
KLA TENCOR CORP [KLAC]
(Last)
(First)
(Middle)
C/O KLA-TENCOR CORPORATION, 160 RIO ROBLES		 4. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
_____导演 _____ 10% Owner
__X__ Officer (give title below) _____ Other (specify below)
Group VP, Field Operations
5. If Amendment, Date Original Filed(Month/Day/Year)
(街)

SAN JOSE, CA 95130		 6. Individual or Joint/Group Filing(检查适用线)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Beneficially Owned
1.Title of Security
(Instr. 4)		 2. Amount of Securities Beneficially Owned
(Instr. 4)		 3. Ownership Form: Direct (D) or Indirect (I)
(Instr. 5)		 4. Nature of Indirect Beneficial Ownership
(Instr. 5)

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly. SEC 1473 (7-02)
体育rsons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB control number.

Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 4)		 2. Date Exercisable and Expiration Date
(Month/Day/Year)		 3. Title and Amount of Securities Underlying Derivative Security
(Instr. 4)		 4. Conversion or Exercise Price of Derivative Security 5. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 5)		 6. Nature of Indirect Beneficial Ownership
(Instr. 5)
Date Exercisable Expiration Date Title Amount or Number of Shares
Non-Qualified Stock Option (right to buy) 11/10/2005 11/10/2010 Common Stock 3,938 $ 26.25 D
Non-Qualified Stock Option (right to buy) 10/02/2002 10/02/2011 Common Stock 14,250 $ 29.31 D
Non-Qualified Stock Option (right to buy) 04/04/2002 04/04/2011 Common Stock 4,667 $ 32.75 D
Non-Qualified Stock Option (right to buy) 10/27/2000 10/27/2009 Common Stock 334 $ 33.75 D
Non-Qualified Stock Option (right to buy) 11/08/2003 01/28/2013 Common Stock 20,000 $ 34.67 D
Non-Qualified Stock Option (right to buy) 11/08/2003 11/08/2012 Common Stock 10,000 $ 37.05 D
Non-Qualified Stock Option (right to buy) 08/13/2000 08/13/2010 Common Stock 3,243 $ 44.6875 D
Non-Qualified Stock Option (right to buy) 11/08/2003 07/30/2013 Common Stock 10,000 $ 51.229 D
Non-Qualified Stock Option (right to buy) 10/27/2004 10/27/2013 Common Stock 18,000 $ 53.86 D

Reporting Owners

Reporting Owner Name / Address Relationships
Director 10% Owner Officer Other
YARBRO STAN
C/O KLA-TENCOR CORPORATION
160 RIO ROBLES
SAN JOSE, CA 95130		 Group VP, Field Operations

Signatures

By: Stuart J. Nichols For: Stan K. Yarbro 11/14/2003
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person,seeInstruction 5(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations.See18 U.S.C. 1001 and 15 U.S.C. 78ff(a).

Note: File three copies of this Form, one of which must be manually signed. If space is insufficient,SeeInstruction 6 for procedure.

Potential persons who are to respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB number.
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