Exhibit 21.1
KLA-Tencor Corporation
List of Subsidiaries as of June 30, 2014
Name
State or Other Jurisdiction of
Incorporation / Organization
DOMESTIC SUBSIDIARIES
International Sales & Business, Inc.
California
KLA-Tencor China Corporation
California
KLA-Tencor International Corporation
California
VLSI Standards, Inc.
California
ADE International Corporation
Delaware
Belize Holdings, LLC
Delaware
KLA-Tencor Asia-Pac Distribution Corporation
Delaware
KT Venture Group, L.L.C.
Delaware
KT Venture Group II, L.L.C.
Delaware
Dino Acquisition Technology L.L.C.
Delaware
INTERNATIONAL SUBSIDIARIES
ICOS Vision Systems Corporation NV
Belgium
ICOS Vision Systems NV
Belgium
Lee Ta Technologies (BVI), Inc.
British Virgin Islands
KLA-Tencor Corporation (Cayman) Limited, I
Cayman Islands
KLA-Tencor Corporation (Cayman) Limited, II
Cayman Islands
KLA-Tencor Corporation (Cayman) Limited, III
Cayman Islands
KLA-Tencor Corporation (Cayman) Limited, IV
Cayman Islands
ICOS Vision Systems (Shenzhen) Co. Ltd.
China
KLA-Tencor国际Trading (Shanghai) Co., Ltd.
China
KLA-Tencor Semiconductor Equipment Technology (Shanghai) Co., Ltd.
China
KLA-Tencor France SARL
France
KLA-Tencor GmbH
Germany
KLA-Tencor MIE GmbH
Germany
KLA-Tencor MIE Holdings GmbH & Co. KG
Germany
KLA-Tencor MIE Holdings Verwaltungs GmbH
Germany
ICOS Vision Systems Ltd.
Hong Kong
KLA-Tencor Software India Private Limited
India
KLA-Tencor Ireland Ltd.
Ireland
Optical Metrology Patents Limited
Ireland
KLA-Tencor Corporation (Israel)
Israel
KLA-Tencor Corporation Holding (1987) Ltd.
Israel
KLA-Tencor Corporation (1992) Ltd.
Israel
KLA-Tencor Integrated Metrology (Israel) (2002) Ltd.
Israel
KLA-Tencor Italy S.R.L.
Italy
KLA-Tencor Japan, Ltd.
Japan
KLA-Tencor Korea, Inc.
Korea
KLA-Tencor MIE Holdings S.à r.l.
Luxembourg
KLA-Tencor (Malaysia) Sdn Bhd
Malaysia






Name
State or Other Jurisdiction of
Incorporation / Organization
KLA-Tencor (Singapore) Pte. Ltd.
Singapore
KLA-Tencor Singapore Holding Co. Pte. Ltd.
Singapore
KLA Instruments S.A.
Switzerland
KLA-Tencor Yield Management Software Taiwan Corporation
Taiwan
KLA-Tencor (Thailand) Limited
Thailand
KLA-Tencor有限
United Kingdom



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