展览21.1. KLA-Tencor子公司姓名姓名州或其他司法管辖区国内子公司国际销售和商业，Inc。加州KLA-Tencor Building Corporation加州KLA-Tencor International Corporation California Kla-Tencor Klinnik Corporation California Kla-Tencor Technologies Corporation加州Kla-Tencor（泰国分公司）California VLSI标准，Inc。加州芬乐Technologies，Inc。德克萨斯州国际子公司KLA-Tencor（Cayman）Limited I Cayman Islands Kla-Tencor（Cayman）Limited II Cayman Islands Kla-Tencor（Cayman）Limited III Cayman Islands KLA-Tencor (Cayman) Limited IV Cayman Islands KLA-Tencor (Israel) Corporation Israel KLA-Tencor Holding Corporation 1987 Limited Israel KLA-Tencor Corporation 1992 Limited Israel KLA-Tencor Italy S.R.L. Italy KLA-Tencor Japan, Ltd. Japan Phase Metrics Japan Co., Inc. Japan KLA-Tencor Foreign Sales Corporation Barbados KLA-Tencor GmbH Germany KLA-Tencor France SARL France KLA-Tencor Korea, Inc. Korea Phase Metrics Korea Co., Ltd. Korea KLA-Tencor Limited United Kingdom KLA-Tencor (Malaysia) Sdn Bhd Malaysia Phase Metrics Malaysia, Sdn, Bhd Malaysia KLA-Tencor (Singapore) PTE, Ltd. Singapore Phase Metrics Pacific PTE, Ltd. Singapore KLA-Tencor (Service) Limited United Kingdom VLSI Standards, KK Japan KLA-Tencor International Trading (Shanghai) Co. Ltd. China KLA-Tencor Microelectronics Equipment (Tianjin) Co., LTD China KLA Instruments Switzerland, S.A. Switzerland Nanopro GmbH Germany Yield Analysis Software Technologies, Ins. Taiwan Lee Ta Technologies (BVI), Inc. British Virgin Islands Phase Metrics Thailand Co., Ltd. Thailand