Annual report pursuant to Section 13 and 15(d)

Goodwill and Purchased Intangible Assets - Schedule of Goodwill (Details)

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Goodwill and Purchased Intangible Assets - Schedule of Goodwill (Details)
$ in Thousands
12 Months Ended
Jun. 30, 2018
USD ($)
reporting_unit
Jun. 30, 2017
USD ($)
Jun. 30, 2016
USD ($)
Goodwill
Number of reporting units | reporting_unit 4
Goodwill
Goodwill, beginning balance $ 349,526 $ 335,177
Acquired goodwill 5,163 14,280
Foreign currency adjustment 9 69
Goodwill, ending balance 354,698 349,526
Accumulated impairment loss 277,600 277,600 $ 277,600
Wafer Inspection
Goodwill
Goodwill, beginning balance 281,095 281,026
Acquired goodwill 0 0
Foreign currency adjustment (90) 69
Goodwill, ending balance 281,005 281,095
Patterning
Goodwill
Goodwill, beginning balance 53,255 53,255
Acquired goodwill 0 0
Foreign currency adjustment 0 0
Goodwill, ending balance 53,255 53,255
GSS
Goodwill
Goodwill, beginning balance 2,856 0
Acquired goodwill 5,163 2,856
Foreign currency adjustment 20 0
Goodwill, ending balance 8,039 2,856
Others
Goodwill
Goodwill, beginning balance 12,320 896
Acquired goodwill 0 11,424
Foreign currency adjustment 79 0
Goodwill, ending balance $ 12,399 $ 12,320
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