Product Description
The Alpha-Step D-500 stylus profiler supports 2D measurements of step height, roughness, bow and stress. The innovative optical lever sensor technology offers high resolution measurements, large vertical range and low force measurement capability.
An advantage of the profilometer’s stylus measurement technique is that it is a direct measurement, independent of material properties. Adjustable force and choice of stylus enable accurate measurements of a wide variety of structures and materials. This enables quantification of your process to determine the amount of material added or removed, plus any changes in structure by measuring roughness and stress.
Features
- Step Height: Nanometers to 1200µm
- Low Force: 0.03 to 15mg
- Video: 5MP high-resolution color camera
- Keystone Correction: Removes distortion due to side view optics
- Arc Correction: Removes error due to arc motion of the stylus
- Compact Size: Smallest system footprint for a benchtop stylus profiler
- Software: User friendly software interface
Applications
- Step Height: 2D step height
- Texture: 2D roughness and waviness
- Form: 2D bow and shape
- 压力:二维thin film stress
Industries
- Universities, research labs and institutes
- Semiconductor and compound semiconductor
- 领导:发光二极管
- Solar
- MEMS: Micro-electro-mechanical systems
- Automotive
- Medical devices
- And more: Contact us with your requirements
